Semiconductor Pressure Regulator 'ER-1HL・ER-1LL'
To solar cell, LCD, and LED production factories, as well as universities and research institutions conducting research! It can be used for semiconductor applications.
The "ER-1HL・ER-1LL" is a pressure regulator suitable for semiconductor applications. In manufacturing, we implement "clean room assembly," "high-performance cleaning," and "100% He leak testing" to meet high levels of cleanliness, airtightness, and reliability. The He leak test is conducted according to the SEMI F01 method and meets the standards. 【ER-1HL Specifications (Excerpt)】 ■ Primary pressure measurement (MPa): 2–15 ■ Secondary side operating pressure (MPa): 0.1–0.99 ■ Operating temperature (°C): -5–40 (design temperature -10–75°C) ■ Diameter: 1/4 ■ Weight (kg): 1.3 ■ Built-in filter filtration degree: 5μm *For more details, please refer to the PDF document or feel free to contact us.
- 企業：ヤマト産業
- 価格：Other
